Elimination of dendrite formation during metal/chalcogenide glass deposition

ABSTRACT

A method of forming a programmable conductor memory cell array is disclosed wherein metal and chalcogenide glass are co-sputtered to fill an array of cell vias in a prepared substrate. The prepared substrate is heated above room temperature before the metal and chalcogenide glass film is deposited, and the heating is maintained throughout the deposition. The resulting metal/chalcogenide glass film has good homogeneity, a desired ratio of components, and has a regular surface.

REFERENCE TO RELATED APPLICATIONS

[0001] This application is a continuation of U.S. application Ser. No.10/164,646, by Li, et al., filed on Jun. 6, 2002, entitled ELIMINATIONOF DENDRITE FORMATION DURING METAL/CHALCOGENIDE GLASS DEPOSITION, withattorney docket no. MICRON.250A, the entirety of which is herebyincorporated by reference. This application is also related to thedisclosure of U.S. application Ser. No. 10/164,429 of Li et al., filedJun. 6, 2002, entitled CO-SPUTTER DEPOSITION OF METAL-DOPEDCHALCOGENIDES, attorney docket no. MICRON.243A.

BACKGROUND OF THE INVENTION

[0002] 1. Field of the Invention

[0003] This invention relates generally to methods of formingmetal-chalcogenide glass structures and more particularly to a method ofpreventing formation of extraneous metal dendrite structures duringfabrication of programmable conductor memory cells usingmetal-chalcogenide glass systems.

[0004] 2. Description of the Related Art

[0005] The digital memory most commonly used in computers and computersystem components is the dynamic random access memory (DRAM), whereinvoltage stored in capacitors represents digital bits of information.Electric power must be supplied to the capacitors to maintain theinformation because, without frequent refresh cycles, the stored chargedissipates, and the information is lost. Memories that require constantpower are known as volatile memories.

[0006] Non-volatile memories do not need frequent refresh cycles topreserve their stored information, so they consume less power thanvolatile memories. The information stays in the memory even when thepower is turned off. There are many applications where non-volatilememories are preferred or required, such as in lap-top and palm-topcomputers, cell phones or control systems of automobiles. Non-volatilememories include magnetic random access memories (MRAMs), erasableprogrammable read only memories (EPROMs) and variations thereof.

[0007] Another type of non-volatile memory is the programmable conductoror programmable metallization memory cell, which is described by Kozickiet al. in U.S. Pat. No. 6,084,796 and is included by reference herein.The programmable conductor cell of Kozicki et al. (also referred to as ametal dendrite memory) comprises a glass ion conductor, such as achalcogenide-metal ion glass, and a plurality of electrodes disposed atthe surface of the fast ion conductor and spaced a distance apart fromone another. The glass/ion element shall be referred to herein as a“glass electrolyte,” or, more generally, a “cell body.” When a voltageis applied across the anode and the cathode, a non-volatile metaldendrite grows from the cathode along the surface of the cell bodytowards the anode. The growth of the dendrite depends upon appliedvoltage and time; the higher the voltage, the faster the growth rate;and the more time, the longer the dendrite. The dendrite stops growingwhen the voltage is removed. The dendrite shrinks, re-dissolving metalions into the cell body, when the voltage polarity is reversed.

[0008] The programmable conductor memory cell can serve as a “one” statewhen the conductive path has grown all the way from the cathode to theanode, thus providing a low resistance metallic conduction path. Theprogrammable conductor memory cell is in a “zero” state when theconductive path is at least partially dissolved, and the metallicconduction path is broken and the resistance of the cell is severalorders of magnitude higher. In other arrangements, varying extent of theconductive path can be used in forming variable capacitors or variableresistors.

[0009] The recent trends in memory arrays generally have been to firstform a via, then fill it with a conventional memory storage element(e.g., a capacitor) and etch back. It is simple to isolate individualmemory cells with this container structure. Following this trend,programmable memory cells have been also fabricated using this sort ofcontainer configuration, wherein the electrodes and body layers aredeposited into a via etched into an insulating layer. Under normaloperating conditions, conductive paths can grow between the electrodes,such as along the interface between the cell and the via wall.Typically, the memory cell is formed in an array having a conventionalmemory array circuit design. For example, in a conventional cross-pointcircuit design, memory elements are formed between upper and lowerconductive lines at intersections. Typically, after forming the lowerset of lines, a via is formed in an insulating layer and filled with thememory element, such as a glass electrolyte or glass fast ion diffusion(GFID) element.

[0010] Deposition of metal and chalcogenide glass is not simple. Atnormal deposition temperatures, metal atoms are highly mobile and candiffuse away from the glass or can form extraneous metal-richstructures, thus altering the component proportions in the depositedmixture and, thus, the performance of the programmable conductor memorycells.

[0011] Accordingly, a need exists for improved methods for depositingmetal and chalcogenide glass to form integrated programmable conductormemory arrays.

SUMMARY OF THE INVENTION

[0012] In accordance with one aspect of the present invention, a methodis provided for forming a programmable conductor memory cell. The methodincludes sputtering metal and chalcogenide glass onto a preparedsubstrate. The substrate is maintained at a temperature higher than roomtemperature during sputtering.

[0013] In accordance with another aspect of the present invention, amethod is provided for depositing a metal/chalcogenide glass film with adesired metal to glass ratio onto a substrate. The method includespre-heating the substrate to a desired temperature between about 40° C.and 130° C. Metal and chalcogenide glass are co-sputtering metal andchalcogenide glass onto the substrate after pre-heating. The substrateis held at the desired temperature during the co-sputtering.

[0014] In accordance with another aspect of the invention, a method isprovided for co-sputtering a homogeneous metal/chalcogenide glass layeronto a irregular surface. The irregular surface is kept at an elevatedtemperature, above room temperature, before and during theco-sputtering.

BRIEF DESCRIPTION OF THE DRAWINGS

[0015]FIG. 1 is a schematic cross-section of a via formed in aninsulating layer, within which via chalcogenide glass elements are to bedeposited.

[0016]FIG. 2A is a schematic drawing of an array of vias that have beenfilled with silver and germanium selenide sputtered at room temperature.

[0017]FIG. 2B is a schematic drawing of one isolated via filled withsilver and germanium selenide sputtered at room temperature.

[0018]FIG. 3A is a schematic drawing of an array of vias that have beenfilled with silver and germanium selenide sputtered at 50° C.

[0019]FIG. 3B is a schematic drawing of one isolated via filled withsilver and germanium selenide sputtered at 50° C.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENT

[0020] Metal/chalcogenide glass films form the key functional structureof programmable conductor memory cells. It is within these films thatmetal dendrite growth or shrinkage occurs in response to an appliedvoltage. Reproducible conductive path growth and shrinkage are essentialto the proper functioning of these memory devices. The programmableconductor memory cell can serve as a “one” state when the conductive hasgrown all the way from the cathode to the anode, thus providing ametallic path for easy conduction. The programmable conductor memorycell can serve as a “zero” state when the conductive path is at leastpartially dissolved, and the short from electrode to electrode isbroken.

[0021] Often, the metal and chalcogenide glass are sputtered to fill anarray of device vias, as one or more step(s) in fabricating aprogrammable conductor memory cell array. However, because of the highmobility of the metal atoms, metal dendrites can form around the devicevias during the sputter deposition. The dendrites seem to nucleate attop edges of the vias and can extend for several microns along thesurrounding surface. These dendrites are extraneous and should not beconfused with the conductive paths that grow and shrink within theprogrammable conductor memory cells under normal operating conditions.

[0022] Extraneous dendrite formation during metal/chalcogenide glassdeposition can cause a number of problems. The metal contained withinthe extraneous dendrites is intended to be included in the as-depositedmetal/chalcogenide glass mixture that forms the programmable conductormemory cells. The metal that forms the dendrites is removed from themetal/chalcogenide glass mixture by the migration of metal duringextraneous dendrite formation and the component proportions are thusdifferent than intended. Controlled and consistent composition isimportant for reproducible functioning of the device. If there is lessmetal in the cell mixture, it may take a higher voltage and/or a longertime for a cell dendrite to grow across the cell and to switch the cellfrom a “zero” state to a “one” state. The extraneous dendrites alsocause changes in the surface morphology around the device vias. Thisnon-planar topography can cause problems during subsequent processsteps, such as photolithography and etch.

[0023] A method of depositing metal/chalcogenide glass films to formprogrammable conductor memory cells without forming extraneous dendritesis needed. The aforementioned need is satisfied by the process of thepreferred embodiment, which includes conducting the deposition processunder conditions of elevated temperatures.

[0024] The preferred embodiments are illustrated in the context ofco-sputtering of metal and chalcogenide glass for a programmableconductor memory cell array, for which the preferred embodiments haveparticular utility. The skilled artisan will readily appreciate,however, that the materials and methods disclosed herein will haveapplication in a number of other contexts where prevention of dendriteformation is desirable. For example, in one embodiment, chalcogenideglass (e.g., Ge_(x)Se_(1-x)) is first deposited, followed by sputteringmetal (e.g., Ag). The glass element can then be doped with metal byphotodissolution, as is known from prior disclosures. In such anembodiment, elevated temperatures are preferably maintained, asdisclosed below, at least during the metal sputtering phase.

[0025] These and other objects and advantages of the present inventionwill become more fully apparent from the following description taken inconjunction with the accompanying drawings.

[0026] There are a number of possibilities that might explain extraneouson surface dendrite formation during deposition. One possible mechanismis that the step edge, where the via meets the uppermost surface of thesurrounding insulating layer, is energetically favorable for atomabsorption. Therefore, highly mobile metal atoms have a high probabilityof being absorbed at the step edge. Metal atoms cluster together at thestep edge, forming a nucleation site for dendrite growth. There are manyfree metal atoms available from the surrounding layer surface tocontribute to a growing dendrite.

[0027] If a metal with low mobility were used, there would be lesslikelihood of forming extraneous dendrites, but this would work againstthe proper functioning of a chalcogenide glass-based memory device. Ametal with low mobility would also be less likely to form a conductivepath within the memory cell when a voltage is applied, which isnecessary for the cell to function. Metals with high mobility aretherefore most desirable for use in chalcogenide glass-based memorydevices.

[0028] Experiments were done to try to reduce or eliminate extraneousdendrite formation. Test structures were formed on production gradesilicon wafers 4 covered by 600 Å of tungsten 6, followed by a 500 Ålayer of silicon nitride 8, to simulate actual device arrayconstructions. Individual isolated vias 9 and arrays of vias werepatterned and etched into the nitride layer to a depth of 50 nm. Thewafers were heated to various test temperatures and held on the heatedwafer stage for at least 5 minutes to obtain a stable and uniformtemperature distribution across the wafer. Layers of silver andgermanium-selenide were co-sputtered to a thickness of 50 nm.Co-sputtering was performed in accordance with the teachings of U.S.application Ser. No. 10/164,429 of Li et al., filed Jun. 6, 2002,entitled CO-SPUTTER DEPOSITION OF METAL-DOPED CHALCOGENIDES, attorneydocket no. MICRON.243A, the disclosure of which is incorporated hereinby reference. Results from these experiments are shown in FIGS. 2A, 2B,3A, and 3B for vias having a width of about 0.5 μm. To make comparisonssimple, the figures have been drawn to approximately the samemagnification.

[0029]FIG. 2A is a schematic drawing made from an electron micrographthat shows a via array structure 10 after deposition of silver andgermanium-selenide, co-sputtered at room temperature. There are a numberof dendrites 12 growing out from the periphery of the array. Inaddition, in the outermost columns, nearly every via 14 has thebeginning of a silver dendrite structure 16 formed along an edge. Thesewere all seen clearly in the original micrograph whose magnification was5000×.

[0030]FIG. 2B is a schematic drawing made from an electron micrographthat shows an isolated via 20 in another region of the test structureafter deposition of silver and germanium-selenide, co-sputtered at roomtemperature. Extensive silver dendrite growth can be seen in themicrograph whose magnification is 2600×. In one example, three longdendrites 22 extend outward from the test via 20, and additional silverprecipitation 24 has occurred along the rim of the via.

[0031]FIG. 3A is a schematic drawing made from an electron micrographthat shows a via array structure 10 after deposition of silver andgermanium-selenide, co-sputtered at 50° C. No dendrite formation can beseen even at an electron micrograph magnification of 15,000×.

[0032]FIG. 3B is a schematic drawing made from an electron micrographthat shows an isolated via 20 in another region of the test structureafter deposition of silver and germanium-selenide, co-sputtered at 50°C. No dendrite formation or silver precipitation can be seen even at anelectron micrograph magnification of 50,000×.

[0033] The preferred embodiments of the current invention provide amethod of forming a programmable conductor memory cell that minimizesor, preferably, eliminates extraneous dendrite formation.

[0034] In a preferred embodiment, a metal and a chalcogenide glass aresputtered onto a prepared substrate that is maintained at a temperaturehigher than room temperature during the sputtering. Preferably, themetal and the chalcogenide glass are co-sputtered, or sputteredconcurrently from separate sputtering targets in the same physical vapordeposition (PVD) or sputtering chamber. The chalcogenide glass can besputtered using a pulsed DC power supply.

[0035] Generally, for fabrication of programmable conductor memory cellshaving a container configuration, the prepared substrate comprises a topinsulating layer with vias therein. It should be understood that,although the illustrated embodiments of the current invention have beendescribed for a container configuration, they may be useful also forother configurations of programmable conductor memory cells and forother applications wherein layers of metal-diffused chalcogenide glasswithout dendrites are desired.

[0036] The chalcogenide glass can comprise chalcogens such as sulfur,selenium, or tellurium. Preferably, the chalcogenide glass alsocomprises selenium and germanium in a ratio of Ge:Se between about 4:6and 2:8. The metal can comprise any metal that is a fast diffuser inchalcogenide glass, including but not limited to silver or copper.Preferably, sputtering the metal and chalcogenide glass results in aprogrammable conductor memory cell with a desired ratio of components.

[0037] More generally, it will be understood that the memory cell formedof metal-doped chalcogenide glass comprises constituents in proportionsto maintain the cell body in an amorphous state. The skilledpractitioner will appreciate that the amorphous state of the metal-dopedchalcogenide glass such as germanium selenide (Ge_(x)Se_(1-x)) dependsupon both the value of x and the relative concentration of the metalwithin the memory cell.

[0038] A phase diagram can be used to select a value for x and to selectthe amount of metal that is to dope the chalcogenide glass such that thechalcogenide glass remains amorphous. Such a phase diagram can be foundin Mitkova et al., “Dual Chemical Role of Ag as an Additive inChalcogenide Glasses,” Physical Review Letters, Vol. 86, No. 19 (Nov. 8,1999), pp. 3848-3851. FIG. 1 of Mitkova illustrates two glass forming oramorphous regions for germanium selenide (Ge_(x)Se_(1-x)) doped withsilver (Ag). In one example, where x is 30, i.e., 0.30, so that thegermanium selenide glass is Ge₃₀Se₇₀, the amount of silver (Ag) used todope the germanium selenide should fall within about 0% to 18% or withinabout 23% to 32% by atomic percentage versus the amount of selenide(Se).

[0039] Preferably, the prepared substrate is maintained at a temperaturebetween about 30° C. and 150° C., more preferably between about 40° C.and 130° C. and most preferably, between about 45° C. and 60° C. duringthe sputtering. In some arrangements, the prepared substrate ismaintained at the desired temperature for more than 1 minute andpreferably for at least about 5 minutes before sputtering the metal andchalcogenide glass.

[0040] Hence, although the foregoing description of the preferredembodiments of the present invention has shown, described and pointedout the fundamental novel features of the invention, it will beunderstood that various omissions, substitutions and changes in the formof the detail of the method as illustrated as well as the uses thereofmay be made by those skilled in the art, without departing from thespirit of the present invention. Consequently, the scope of the presentinvention should not be limited to the foregoing discussion, but shouldbe defined by the appended claims.

We claim:
 1. A method of forming a programmable conductor memory cellcomprising: sputtering metal and chalcogenide glass onto a preparedsubstrate; and maintaining the prepared substrate at a temperaturehigher than room temperature during the sputtering.
 2. The method ofclaim 1, wherein sputtering metal and chalcogenide glass comprises firstsputtering a chalcogenide glass element and then separately sputtering ametal layer thereover.
 3. The method of claim 1, wherein sputteringmetal and chalcogenide glass comprises co-sputtering.
 4. The method ofclaim 1, wherein the prepared substrate comprises a top insulating layerwith vias therein.
 5. The method of claim 1, wherein the programmableconductor memory cell comprises metal and chalcogenide glass containingbetween about 25% and 35% metal.
 6. The method of claim 1, wherein themetal is a fast diffuser.
 7. The method of claim 1, wherein the metal issilver.
 8. The method of claim 1, wherein the metal is copper.
 9. Themethod of claim 1, wherein the chalcogenide glass comprises componentsselected from the group consisting of sulfur, germanium, selenium, andtellurium.
 10. The method of claim 1, wherein the chalcogenide glasscomprises germanium selenide.
 11. The method of claim 1, furthercomprising maintaining the prepared substrate at a temperature higherthan room temperature for at least 5 minutes before sputtering the metaland chalcogenide glass.
 12. The method of claim 1, wherein maintainingthe prepared substrate at a temperature higher than room temperaturecomprises maintaining the prepared substrate at between about 30° C. and150° C.
 13. The method of claim 1, wherein maintaining the preparedsubstrate at a temperature higher than room temperature comprisesmaintaining the prepared substrate at between about 45° C. and 60° C.14. A method of co-sputtering a homogeneous metal/chalcogenide glasslayer onto an irregular surface, comprising keeping the irregularsurface at an elevated temperature, above room temperature, before andduring the co-sputtering.
 15. The method of claim 14, wherein themetal/chalcogenide glass layer comprises silver, germanium, andselenium.